METHOD AND APPARATUS FOR THE FORMATION OF AN ELECT

专利名称：METHOD AND APPARATUS FOR THE

FORMATION OF AN ELECTRONIC DEVICE

发明人：BAKER, Dean,LEWIS, Martin,RAMSDALE,

Catherine

申请号：EP09785702.3申请日：20090928公开号：EP2351115A1公开日：20110803

摘要：A process of forming an electronic device, by forming the source and draincontacts using photolithography, incorporating a self-assembled monolayer (SAM) overthe electrical contacts to form an increased work function of the source and drainelectrodes and further forming more favourable charge injection properties or within thechannel region to improve film morphology and therefore improve charge transport. TheSAM material is added to the photoresist stripper during a step of the photolithographyprocess of forming electrical contacts.

申请人：Plastic Logic Limited

地址：34 Cambridge Science Park Milton Road Cambridge Cambridgeshire CB4 0FX GB

国籍：GB

代理机构：Gwilt, Julia Louise

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